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X-ray photoelectron spectroscopy (XPS/ESCA)
Instrumentation
- Thermo Fisher Nexsa G2, a high-resolution XPS device with energy resolution up to < 0.5 eV FWHM
- Argon cluster gun for sputtering, with both monatomic and cluster modes available (MAGSIS)
- 2D-imaging with ultimate spatial resolution of 10 μm
- Dual charge compensation for accurate analysis of both insulating and conductive samples
- Ultra-high vacuum analysis chamber, up to 5xE-9 mbar
- UV Photoelectron Spectroscopy (UPS)
- Ion Scattering Spectroscopy (ISS)
- Reflected Electron Energy Loss Spectroscopy (REELS)
- Sample heating stage for in-situ temperature controlled measurements, range 25 – 800 °C
- Sample transfer module for air sensitive samples to be prepared in a glove box
Analysis
- All the methods are extremely surface sensitive. ISS for the most topmost atomic layer, XPS penetration depth ~10 nm.
- Quantitative elemental analysis by nondestructive methods
- Oxidation states of different elements, which can also be quantified
- 2D-mapping for visual distribution, max resolution 10 μm
- Depth profiling for all kind of materials. Cluster gun enables the profiling of polymer samples without damaging the chemical structure.
- Valence energy and Work function determination by UPS
- Band gap determination by REELS
- Elemental identification of the topmost atomic layer by ISS
Sample requirements
- Only solid samples can be measured due to the vacuum in the analysis chamber
- Maximum sample dimensions 60 mm x 60 mm x 20 mm (length x width x height)