Manufacturing of optics

Micro- and nanopatterning

Micro- and nanopatterning

We offer fabrication service of micrometer and nanometer scale features.

The service includes design, fabrication, and evaluation of a product. We offer the full fabrication chain, or a part, such as fabrication according to the customer design.

We use electron beam writing and various supplementary lithographic techniques in our fabrication process at cleanroom environment.

Application areas include optical, tactile, tailored, and functional surfaces utilizing micrometer and nanometer scale features.

Our equipment includes:

  • Raith EBPG5000+ES electron beam writer
  • LAB18 Physical Vapour Deposition system
  • Quorum Q300T sputter coater
  • Beneq TFS-200 Atomic Layer Deposition system
  • Oxford Instruments Plasmalab 100 and 80 RIE/ICP etching systems
  • Obducat EITRE-3 Nanoimprint lithography system
  • Jenoptik EFNI-01 Nickel electroplater

Our methods include:

  • Electron beam lithography
  • Thin film deposition
    • Evaporation
    • Sputtering
    • Atomic Layer Deposition (ALD)
  • Etching
    • Reactive ion etching (RIE)
    • Wet etching
  • Replication
    • Nanoimprint lithography (NIL)
    • Hot embossing
    • Roll-to-roll imprinting
    • Nickel electroplating

Contact person:

Pertti Pääkkönen, Senior Laboratory Manager
pertti.paakkonen@uef.fi
0505056376
Itä-Suomen yliopisto, Yliopistokatu 7, 80100 Joensuu


Direct 3D printing

Direct 3D printing

We offer fabrication service of directly printed optical elements

The service includes design, fabrication, and evaluation of a product. We offer the full fabrication chain, or a part, such as fabrication according to the customer design.

We use direct 3D printing based on inkjet technology.

Application areas include free-form optical components made of acrylic-like polymer. The method is ideal for prototyping purposes.

Our equipment includes:

Custom inkjet 3D printer

Contact person:

Petri Karvinen, Research Manager
e-mail: petri.karvinen@uef.fi
tel: +358 50 324 7678
Petri Karvinen - UEFConnect